Large Area Analysis
Assembly Line
Improving Semiconductor Yield Using Large Area Analysis
Lam Research’s SEMulator3D® virtual fabrication platform can be used to perform 3D modeling and rules-based metrology of semiconductor devices, and to identify hotspots (DRC violations) and potential failures faster and at a lower cost than silicon wafer-based experimentation.
Large area analysis (LAA) is a powerful concept in semiconductor engineering research and development. LAA are sets of experiments that can be used to explore the sensitivity of a potential hotspot and its effect on downstream process steps across a large chip area. A well-designed LAA can help an engineer develop an optimal semiconductor process using a limited number of experimental wafer runs.