Lumina Instruments
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Onto Innovation Announces “Tuck-In” Acquisition of Lumina Instruments, Inc. and Lithography Business of Kulicke and Soffa
Onto Innovation Inc. (NYSE: ONTO), a global provider of process control and packaging lithography solutions to the semiconductor market, announced that it has acquired Lumina Instruments, Inc. based in Milpitas, California.
Opportunities for inspection of surface and subsurface defects and contamination continue to grow as applications in panel-level packaging transition to glass. Simultaneously, silicon carbide (SiC) and gallium nitride (GaN) wafer-based power markets continue to grow and so do the process control challenges in their manufacturing as wafer sizes migrate from 150mm to 200mm and 200mm to 300mm, respectively.
Onto Innovation also acquired the lithography business from Kulicke and Soffa Industries, Inc., gaining 24 patents issued, eight additional patents pending, and more than 200 man-years of semiconductor lithography and wafer applications experience. Equipped with a strong set of hardware and software technologies, differentiating patents, and unique designs for metrology and lithography performance, this team will accelerate and expand the JetStep® panel lithography roadmap.